STAGE - Chemical Laboratory

  • Facility: Avezzano (Italy)
  • Job time: Stage

Characterization of VOC contamination in fab c/r environment, and subsequent set-up of a monitoring methodology and strategy

VOC (Volatile Organic Compounds) may affect semiconductor production yield by defect generation (e.g. in ECP process) or damaging the lens coating of photolithography production equipment. VOC concentration and composition in the fab c/r environment depends on internal and external sources, which may change for seasonal reasons as well. A characterization of the contamination is necessary to establish the most effective methodology and strategy for VOC monitoring.

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